Precision machining yog hais txog lub ntsiab lus dav dav rau kev ua kom raug thiab qhov chaw tiav tshaj li cov txheej txheem ua tiav. Nws feem ntau suav nrog precision txiav (xws li pob zeb diamond tho txawv thiab precision tig) thiab siab - precision sib tsoo. Nws qhov tseeb machining feem ntau yog 10 ~ 0.1μm, nrog rau qib siab ntawm IT5 lossis siab dua, thiab qhov roughness Ra hauv qab 0.1μm. Cov txheej txheem no yuav tsum muaj siab - cov cuab yeej siv tshuab precision thiab cov cuab yeej txiav hauv av zoo, ua tiav siab - precision machining los ntawm qhov tob me me ntawm kev txiav thiab pub tus nqi. Hauv cov khoom siv laser semiconductor, nws siv cov thev naus laus zis xws li laser scribing, marking, thiab debonding, thiab koom nrog kev tsim thiab tsim khoom ntawm high{11}}precision optical systems.
Cov txheej txheem no suav nrog cov thev naus laus zis xws li precision stamping ntawm semiconductor lead thav duab thiab machining ntawm aero- cav hniav. kuv lub teb chaws tau ua tiav sub-nanometer- theem machining raug rau cov khoom siv kho qhov muag, tawg los ntawm cov thev naus laus zis xws li magnetorheology thiab ion beam polishing khoom. Txoj cai pib qhia txog kev ua tiav hauv cov thev naus laus zis tseem ceeb rau kev tsim cov khoom siv thiab cov khoom siv sib sib zog nqus, tsim kom muaj kev sib koom tes tsim kho tshiab ntawm cov ntaub ntawv, txheej txheem, thiab kev siv hauv thaj chaw automotive lightweighting. Ion beam polishing tshuab tau ua tiav qhov tsawg kawg nkaus tswj cov khoom tshem tawm tus nqi ntawm 0.1 nanometers, muab kev txhawb nqa rau kev tshawb fawb hauv tebchaws loj thiab cov haujlwm xws li kev tsim hluav taws xob sib xyaw.
